Abstract

In this study, thin films of Gallium oxide nanoparticles were equipped using the method of ‎pulsed laser deposition (PLD)on a glass substrate under different vacuum conditions (5×10-5,  2×10-2, and ‎‎1mbar).  The Nd-YAG laser was utilized at a wavelength of 1064 nm and a frequency ‎‎of 5 Hz at  130 0C. The increase effect of the vacuum value on the optical and structural ‎characteristics was studied by UV-VIS, X-ray diffraction )XRD), scanning electron ‎microscopy (SEM), and Photoluminescence properties (PL). The outcomes XRD showed that the ‎structure of Ga₂O₃ nanoparticles is a polycrystalline structure of the monoclinic type, with Prominent ‎crystal orientations of  (001), (201), (400), (-202), (111), and (-112). It is according to JCPDS card ‎No.00-041-1103.  Crystallite size for the complete model decreased with the growth of the vacuum ‎value. The (SEM)  images showed that Ga₂o₃ nanoparticles are spherical and ‎homogeneous. The energy  band gap increased with increasing the vacuum, and the absorption ‎upper was in the UV zone. ‎Similar results were obtained from the researcher MA Yan-Mei et al. [1].